An Optical MIM Pressure Sensor Based on a Double Square Ring Resonator

Abstract

Abstract In this paper, we have proposed a metal-insulator-metal (MIM) pressure sensor which consists of two plasmonic waveguides and a double square ring resonator. The two square rings are connected via a rectangular patch located between the two of them. The surface plasmon polaritons (SPPs) can be transferred from a square ring to the other through this patch. The finite-difference time-domain method (FDTD) has been used to simulate the device. Applying a pressure on the structure, it deforms, and a red shift of 103 nm in the resonance wavelength has been calculated. The deformation is linearly proportional to the wavelength shift in a wide range of wavelength. The proposed optical plasmonic pressure sensor has a sensitivity of 16.5 nm/MPa which makes it very suitable for using in biological and biomedical engineering.

Keywords

• Pressure sensor
• plasmonic resonator
• square ring resonator
• MIM structure
• surface plasmon polaritons