Dynamic Scheduling of a Semiconductor Production Line Based on a Composite Rule Set

Abstract

Various factors and constraints should be considered when developing a manufacturing production schedule, and such a schedule is often based on rules. This paper develops a composite dispatching rule based on heuristic rules that comprehensively consider various factors in a semiconductor production line. The composite rule is obtained by exploring various states of a semiconductor production line (machine status, queue size, etc.), where such indicators as makespan and equipment efficiency are used to judge performance. A model of the response surface, as a function of key variables, is then developed to find the optimized parameters of a composite rule for various production states. Furthermore, dynamic scheduling of semiconductor manufacturing is studied based on support vector regression (SVR). This approach dynamically obtains a composite dispatching rule (i.e., parameters of the composite dispatching rule) that can be used to optimize production performance according to real-time production line state. Following optimization, the proposed dynamic scheduling approach is tested in a real semiconductor production line to validate the effectiveness of the proposed composite rule set.

Keywords

• dynamic scheduling
• semiconductor manufacturing
• composite rule set
• support vector regression (SVR)