THIN FILMS OF COPPER OXIDE NANOSTRUCTURED VIA RAPID THERMAL PROCESSING

Abstract

Nanostructured copper oxide films were obtained by the method of chemical synthesis from solutions (SCS) and exposed to post-growth rapid thermal processing (RTP) in air at different temperatures to study the influence of annealing temperature on morphological, chemical, structural and sensing properties. Controlled modification of surface morphology, in the particular size of nanostructures, crystallinity and phase can be achieved by RTP, which is preferred due to saving of energy budget nowadays. Detailed physico-chemical analysis of the films was performed using the scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman and energy dispersive X-ray (EDX) techniques. Sensors based on the copper oxide nanostructured films after RTP for 30 s only were tested with 100 ppm hydrogen gas at an operating temperature range from 250 ºC to 350 ºC. The difference in the response to 100 ppm hydrogen gas of the sensors based on thermally processed films at different temperatures was determined. We also noted that the change in the response of the sensing structure is correlated with its surface morphology controlled by RTP regime with a short duration. A detection mechanism to hydrogen gas has been proposed as well.

Keywords

• copper oxide
• nanostructures
• scs
• rapid thermal processing
• dft