Тонкие химические технологии (Dec 2006)

Estimation of the MQW InGaAs/GaAs heterostructures stability to the formation of misfit dislocations

  • A. A. Maldzhy,
  • R. Kh. Akchurin,
  • A. A. Marmalyuk

Journal volume & issue
Vol. 1, no. 6
pp. 73 – 77

Abstract

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The stable, metastable and unstable regions of InGaAs/GaAs heterostructures to the formation of misfit dislocations were determined. The character of the strain distribution in the investigating samples has been estimated and the excess stress change in the quantum wells and barrier layers has been designed