Microstructure and Mechanical Properties of Annealed WC/C PECVD Coatings Deposited Using Hexacarbonyl of W with Different Gases
Peter Horňák,
Daniel Kottfer,
Karol Kyzioł,
Marianna Trebuňová,
Janka Majerníková,
Łukasz Kaczmarek,
Jozef Trebuňa,
Ján Hašuľ,
Miroslav Paľo
Affiliations
Peter Horňák
Department of Materials Science, Faculty of Industrial Technologies, Alexander Dubček University of Trenčín, I. Krasku 491/30, 020 01 Púchov, Slovakia
Daniel Kottfer
Department of Mechanical Technologies and Materials, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia
Karol Kyzioł
Department of Physical Chemistry and Modelling, Faculty of Materials Science and Ceramics, AGH University of Science and Technology, A. Mickiewicza 30 Av., 30-059 Kraków, Poland
Marianna Trebuňová
Department of Biomedical Engineering and Measurement, Faculty of Mechanical Engineering, Technical University of Košice, Letná 9, 042 00 Košice, Slovakia
Janka Majerníková
Department of Mechanical Technologies and Materials, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia
Łukasz Kaczmarek
Institute of Materials Science and Engineering, Lodz University of Technology, 1/15 Stefanowskiego Str., 90-924 Łódź, Poland
Jozef Trebuňa
Department of Mechanical Technologies and Materials, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia
Ján Hašuľ
Department of Mechanical Technologies and Materials, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia
Miroslav Paľo
Department of Mechanical Technologies and Materials, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia
The present work studies the tungsten carbide (WC/C) coatings deposited by using Plasma Enhanced Chemical Vapor Deposition (PECVD), with and without gases of Ar and N2. Volatile hexacarbonyl of W was used as a precursor. Their mechanical and tribological properties were evaluated. The following values were obtained by using deposition process with N2 of HIT = 19.7 ± 4.1 GPa, EIT = 221 ± 2.1 GPa, and coefficient of friction (COF) = 0.35 ± 0.09. Secondly, deposition without the aforementioned gas obtained values of HIT = 20.9 ± 2 GPa, EIT = 292 ± 20 GPa, and COF = 0.69 ± 0.05. WC/C coatings were annealed at temperatures of 200, 500, and 800 °C, respectively. Evaluated factors include the introduced properties, the observed morphology, and the structural composition of WC/C coatings. The process of degradation was carried out by using various velocities, depending on used gases and annealing temperatures.
