Integrated Nanomanipulator With In-Process Lithography Inspection

Abstract

Nanomanipulation techniques are extensively in use not only to reveal more characteristics of nano, micro and mesoscopic phenomena but also to build functional nano-devices that can bridge components between two or more scales to diversify the functions. In this paper, a novel integrated and numerically controlled instrument for nanomanipulation, imaging, in-process inspection using lithography with AFM back-to-back probes and characterization of materials at nanoscale is presented. A feature of common datum to all operations to avoid accuracy degradation between references is set. Robotic arms secure nanometre accuracy in the manipulation. The variety of operations is supported by multiple end-effector tools, e.g. force and temperature measurement. Examples are discussed. The availability of such an instrument with integrated functions appeared to be extremely helpful in addressing various fundamental problems in science and engineering such as understanding, modelling and testing nano-machining process, biomimetic design, exact construction of nano-structure arrays, and inspection of devices with complex features.

Keywords

• Nanomanipulators
• nanolithography
• atomic force microscopy
• nanomachining
• nanoscale inspection