Modeling and random search optimization for the polysilicon CVD reactor

Bangwen Xi; Gang Xiong; Kirill A. Kozin; Chang He; Tariku Sinshaw Tamir; Yonggang Song; Xiong Liu; Zhen Shen

Results in Control and Optimization (Dec 2023)

Modeling and random search optimization for the polysilicon CVD reactor

Bangwen Xi,
Gang Xiong,
Kirill A. Kozin,
Chang He,
Tariku Sinshaw Tamir,
Yonggang Song,
Xiong Liu,
Zhen Shen

Affiliations

Bangwen Xi: State Key Laboratory of Multimodal Artificial Intelligence Systems, Beijing Engineering Research Center of Intelligent Systems and Technology, Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China; School of Artificial Intelligence, University of Chinese Academy of Sciences, Beijing 100049, China
Gang Xiong: State Key Laboratory of Multimodal Artificial Intelligence Systems, Beijing Engineering Research Center of Intelligent Systems and Technology, Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China; Guangdong Engineering Research Center of 3D Printing and Intelligent Manufacturing, Cloud Computing Center, Chinese Academy of Sciences, Dongguan 523808, China
Kirill A. Kozin: School of Nuclear Science and Engineering, Tomsk Polytechnic University, Tomsk 634050, Russia
Chang He: State Key Laboratory of Multimodal Artificial Intelligence Systems, Beijing Engineering Research Center of Intelligent Systems and Technology, Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China; School of Artificial Intelligence, University of Chinese Academy of Sciences, Beijing 100049, China
Tariku Sinshaw Tamir: State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China; Institute of Technology, Debremarkos University, Debremarkos 269, Ethiopia
Yonggang Song: Xinte Energy Co., Ltd., Urumqi 830000, China
Xiong Liu: Xinte Energy Co., Ltd., Urumqi 830000, China
Zhen Shen: State Key Laboratory of Multimodal Artificial Intelligence Systems, Beijing Engineering Research Center of Intelligent Systems and Technology, Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China; Intelligent Manufacturing Center, Qingdao Academy of Intelligent Industries, Qingdao 266109, China; Corresponding author at: State Key Laboratory of Multimodal Artificial Intelligence Systems, Beijing Engineering Research Center of Intelligent Systems and Technology, Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China.

Journal volume & issue: Vol. 13
p. 100320

Abstract

Read online

Polysilicon is mainly obtained by the Siemens process chemical vapor deposition (CVD) reaction, in which hydrogen gas and trichlorosilane (TCS) are fed into the CVD reactor to produce polysilicon. However, adjusting the feeding parameters in a step-by-step manner according to the actual deposition results is inefficient. In this paper, based on the existing mechanism model of the CVD reactor, we take use of historical data to construct a more accurate simulator. A random search algorithm is used to find good feeding parameters. The simulator can help increase polysilicon productivity while reduce the unit energy consumption.

Published in Results in Control and Optimization

ISSN: 2666-7207 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Technology (General): Industrial engineering. Management engineering: Applied mathematics. Quantitative methods
Website: https://www.journals.elsevier.com/results-in-control-and-optimization

About the journal

Abstract

Keywords