Integrated Microprisms Matrix for Coupling a Laser Beam in Microfluidic Systems

Abstract

It is still a challenge to integrate the optoelectronic technology in microfluidic analytical systems, due to the complex alignment of the optical components within the microchip, or expensive and complicated methods of their fabrication. In this paper, inexpensive, glass microprisms matrix, with high quality surface and precise 54.7° reflection angle is presented. Fabrication and integration of optical components into the substrate is done using conventional microfabrication techniques such as soft lithography and anode bonding. The results of beam intensity measurements propagating within the glass substrate are presented, showing the possibility of controlled coupling of the beam into the substrate using integrated glass optical structures for microfluidic systems.

Keywords

• integrated optical microstructures
• microprisms matrix
• microengineering