Laser micromachining of diamond: A viable photonic and optofluidic platform

Abstract

We describe how the ultrafast laser micromachining technique applied with different writing methods can be used for the creation of various building blocks essential for the realization of a photonic and optofluidic diamond platform. Waveguides, NV centers, conductive wires, microchannels and microholes can be obtained thanks to laser microfabrication with suitable pulse parameters, making use not only of standard Gaussian laser beams but also of non-diffracting Bessel beams, the latter especially in all those cases where single pass high aspect-ratio microstructures or ablated areas are needed.