Nature Communications (Mar 2018)

Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass

  • Pengfei Yang,
  • Xiaolong Zou,
  • Zhepeng Zhang,
  • Min Hong,
  • Jianping Shi,
  • Shulin Chen,
  • Jiapei Shu,
  • Liyun Zhao,
  • Shaolong Jiang,
  • Xiebo Zhou,
  • Yahuan Huan,
  • Chunyu Xie,
  • Peng Gao,
  • Qing Chen,
  • Qing Zhang,
  • Zhongfan Liu,
  • Yanfeng Zhang

DOI
https://doi.org/10.1038/s41467-018-03388-5
Journal volume & issue
Vol. 9, no. 1
pp. 1 – 10

Abstract

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Growth of large-area monolayer transition metal dichalcogenides is critical for their application but remains challenging. Here Yang et al. report rapid chemical vapor deposition of 6-inch monolayer molybdenum disulfide by sufficiently uniformly supplying the precursors and catalysts.