A method of electron density of positive column diagnosis—Combining machine learning and Langmuir probe

Abstract

In the present study, the machine learning algorithm is utilized for the first time to improve the probe diagnosis. Machine learning methods are utilized to improve the Langmuir probe diagnostic accuracy and the diagnosable plasma parameter range without changing the probe structure based on the Langmuir probe. They provide a new way for experimentally obtaining electron density. A DC glow discharge simulation model and experimental equipment are established. Utilizing the discharge pressure and voltage as independent variables, the simulation and experimental electron densities are collected, the simulation and experimental data are utilized for training, and the plasma electron density outside of the pressure and voltage range of the training data is predicted, thereby achieving the prediction. Simultaneously, when the data amount is large enough, even without experimental measurement, the electron density can be obtained directly through the input parameters, without relying on the plasma physical model.