Obtaining, structure, microstructure and dielectric characteristics of ceramics and thin films of ferro-piezoelectric materials based on the PZT system

Abstract

This paper presents the results of studies of the structure, microstructure, dependences of the piezoelectric properties on the electric field (dielectric hysteresis loops, reversible nonlinearity, deformation characteristics) and dielectric properties of the ceramic material PCR-13 (based on the PZT system) in the temperature range 300–900K and frequencies of an alternating electric field (25÷2⋅106) Hz. The character of the obtained dependences made it possible to attribute PCR-13 to ferro-hard materials. Using the HF cathodic sputtering method, PCR-13 thin films were fabricated on Si (001) substrates. It is shown that they are polycrystalline textured, while in comparison with bulk material, the film contains tensile stresses of the unit cell in the plane of the substrate and compresses in the perpendicular direction with the value ε33=−0.018. The capacitance-voltage characteristics of the Al/PCR-13/Si/Al heterostructure were studied. The reasons for the revealed patterns are discussed.

Keywords

• structure
• dielectric properties
• p-e loops
• s33-e curves
• thin films