P-Type BiSb2Te3 thin film thermoelectric module fabricated on a flexible substrate through magnetron sputtering

Abstract

In this work, we deposited P-type BiSb2Te3-based thin films utilizing magnetron sputtering. After characterisations of their morphology and microstructure, a special in-plane advanced test system was used to simultaneously measure the thermal conductivity, electrical conductivity, and Seebeck coefficient of the thin film. The figure of merit of the thin film can then be calculated. We produced a prototype of a thin-film module based on P-type BiSb2Te3 on Kapton HN polyimide foil Kapton substrate with two different designs. The open-circuit voltage, electric current and electrical resistance of the thin film were measured by a homemade apparatus across various temperature gradients. The BiTe-based thin film flexible TE prototype can effectively convert heat into electricity at temperatures up to 200°C.

Keywords

• pvd
• thermoelectric
• magnetron sputtering
• bisb2te3