Formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences
Liu Wei,
Hu Jie,
Jiang Lan,
Huang Ji,
Lu Jiangang,
Yin Jiangang,
Qiu Zhaoling,
Liu Hailin,
Li Chen,
Wang Suocheng,
Wang Shaojun
Affiliations
Liu Wei
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Hu Jie
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Jiang Lan
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Huang Ji
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Lu Jiangang
Han’s Laser Technology Centre, Shennan Ave No. 9988, Nanshan District, Shenzhen City, Guangdong Province, 518057, P. R. China
Yin Jiangang
Han’s Laser Technology Centre, Shennan Ave No. 9988, Nanshan District, Shenzhen City, Guangdong Province, 518057, P. R. China
Qiu Zhaoling
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Liu Hailin
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Li Chen
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Wang Suocheng
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
Wang Shaojun
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
In this study, we report the formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences (OP pulses). The period of the ring structures is marginally smaller than the irradiated laser’s wavelength, which indicates that the structures are a type of low-spatial-frequency laser-induced periodic surface structures. Regular nanometric concentric ring structures can be formed when the time delay between two subpulses is approximately 1 ps (roughly from 500 fs to 1.5 ps) and the number of laser bursts is approximately 4. The formation mechanism of the concentric ring structures is attributed to the surface wave (i.e., cylindrical wave) stimulated by OP pulses through single-spot irradiation is radially distributed. Large area of concentric ring structures eliminating anisotropy in the generation of structural colors was shown in this paper.
