Improvement of Position Repeatability of a Linear Stage with Yaw Minimization

Abstract

Recently, due to the miniaturization of electronic products, printed circuit boards (PCBs) have also become smaller. This trend has led to the need for high-precision electrical test equipment to check PCBs for disconnections and short circuits. The purpose of this study is to improve the position repeatability of the platform unit up to ±2.5 μm in linear stage type test equipment. For this purpose, the causes of the position errors of the platform unit are analyzed. The platform unit holding the PCB is driven by a single-axis linear ball screw drive system offset from its geometric center due to design constraints. The yaw rotation of the platform is found to have a dominant effect on position repeatability. To address this problem, adding balancing weights to the platform unit and adjusting the stiffness of the LM Guides are proposed. These methods reduce the yaw rotation by moving the centers of mass and stiffness closer to the linear ball screw actuator. In the verification tests, the position repeatability was decreased to less than ±1.0 μm.

Keywords

• precision stage
• balancing weight
• drive force offset
• yaw motion
• error prediction
• low-cost stage