The optimization of design of the membrane sensor

Abstract

The possibility of reducing the power consumed by the gas concentration sensor through the introduction of cracks in the structure of multi-layered membrane has been considered. The conduction of etching of the peaks of pores in concentrated ortophosphoric acid for increasing of the effected area of contact of platinum with sub layer of porous aluminum has been suggested.

Keywords

• gas analyzer
• multi-layer membrane
• silicon nitride
• porous aluminum
• effective contact area
• optimized design