Epitaxial ZnO piezoelectric layer on SiO2/Mo solidly mounted resonator fabricated using epitaxial Au sacrificial layer

Abstract

In solidly mounted resonator (SMR) type of bulk acoustic wave resonator, it is difficult to fabricate single crystalline piezoelectric thin films in a bottom-up process due to the amorphous SiO _2 in the low acoustic impedance layer of the acoustic Bragg reflector. In this study, single crystalline ZnO piezoelectric layer on amorphous SiO _2 /polycrystalline Mo acoustic Bragg reflector is fabricated using a wet etching process of the epitaxial Au sacrificial layer. Epitaxial growth of ZnO was confirmed by X-ray diffraction pole figure and transmission electron microscope electron diffraction pattern. Resonance frequency of 1.3 GHz of epitaxial ZnO SMR was observed using a network analyzer.

Keywords

• BAW filter
• piezoelectric thin film
• epitaxial film
• solidly mounted resonator
• ultrasonic