Multimode Design and Piezoelectric Substrate Anisotropy Use to Improve Performance of Acoustic Liquid Sensors
Andrey Smirnov,
Vladimir Anisimkin,
Natalia Voronova,
Elizaveta Shamsutdinova,
Peng Li,
Hamdi Ezzin,
Zhenghua Qian,
Tingfeng Ma,
Iren Kuznetsova
Affiliations
Andrey Smirnov
Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Vladimir Anisimkin
Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Natalia Voronova
Acoustoelectronic and Piezokeramic ELPA Corporation, 124460 Moscow, Russia
Elizaveta Shamsutdinova
Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Peng Li
State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautic and Astronautic, Nanjing 210016, China
Hamdi Ezzin
State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautic and Astronautic, Nanjing 210016, China
Zhenghua Qian
State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautic and Astronautic, Nanjing 210016, China
Tingfeng Ma
Piezoelectric Device Laboratory, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
Iren Kuznetsova
Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Using acoustic wave modes propagation in piezoelectric plates loaded with conductive liquids, peculiarities of the mode-liquid acoustoelectric interaction are studied. It is found that (i) in contrast to bulk and surface acoustic waves propagating in piezoelectric semiconductors, the acoustoelectric attenuation of the modes is not symmetric in respect to its maximum, (ii) a large increase in attenuation may be accompanied by a small decrease in phase velocity and vice versa, (iii) the peculiarities are valid for “pure” (without beam steering) and “not pure” (with beam steering) modes, as well as for modes of different orders and polarizations, and (iv) conductivity of test liquid increases electromagnetic leakage between input and output transducers, affecting results of the measurements. To decrease the leakage, the liquid should be localized between transducers, outside the zone over them. If so, the mode sensitivity may be as large as 8.6 dB/(S/m) for amplitude and 107°/(S/m) for phase. However, because of comparable cross-sensitivity towards viscosity and dielectric permittivity, modes with selective detection of liquid conductivity are not found.
