Analysis of the Radial Force of a Piezoelectric Actuator with Interdigitated Spiral Electrodes

Abstract

The actuator is a critical component of the micromanipulator. By utilizing the properties of expansion and contraction, the piezoelectric actuator enables the manipulator to handle and grasp miniature objects during micromanipulation. However, in piezoelectric ceramic disc actuators with conventional surface electrode configurations, the actuating force generated in the radial direction is relatively limited. When used as the actuation element of the manipulator, achieving regulation over a wide range of operating strokes becomes challenging. Therefore, altering the electrode structure is necessary to generate a greater radial force, thus enhancing the positioning and grasping capabilities of the operating arm. This paper investigates a piezoelectric actuator with interdigitated spiral electrodes, featuring a constant pitch between adjacent electrodes. The radial force was tested under mechanical clamping conditions, and the influence of the electrical signal was examined. The characteristics of the electrode structure were described, and the working principles of the piezoelectric actuators were analyzed. Theoretical equations were derived for the macroscopic characterization of the radial clamping force of the actuator, based on the piezoelectric constitutive equation, geometric principles, and Bond matrix transformation relationships. A finite element model was developed, reflecting the features of the electrode structure, and finite element simulations were employed to verify the theoretical equations for radial force. To prepare the samples, encircled interdigitated spiral electrode lines were printed on the PZT-52 piezoelectric ceramic disc using a screen printing method. The clamping force experimental platform was established, and experiments on the clamping radial force were conducted with electrical signals of varying waveforms, frequencies, and voltages. The experimental results show that the piezoelectric ceramic disc actuator with an interdigitated spiral electrode line structure, when excited by a stable sine wave operating at 200 V and 0.2 Hz, generated a peak force of 0.37 N. It was 1.76 times greater than that produced by a previously utilized piezoelectric disc with conventional electrode structures.

Keywords

• piezoelectric actuator
• interdigital spiral electrode
• radial force
• electric signal