A Miniaturized Wireless Micropump Enabled by Confined Acoustic Streaming
Rui You,
Qian Fan,
Zilun Wang,
Wenqiang Xing,
Yuchuan Wang,
Yi Song,
Xuexin Duan,
Rui You,
Yan Wang
Affiliations
Rui You
State Key Laboratory of Precision Measuring Technology & Instruments,
Tianjin University, Tianjin 300072, China.
Qian Fan
Tianjin Eye Hospital, Tianjin Key Lab of Ophthalmology and Visual Science, Nankai University Affiliated Eye Hospital, Nankai University Eye Institute, Nankai University, Clinical College of Ophthalmology Tianjin Medical University,
Tianjin Eye Institute, Tianjin 300020, China.
Zilun Wang
State Key Laboratory of Precision Measuring Technology & Instruments,
Tianjin University, Tianjin 300072, China.
Wenqiang Xing
School of Instrument Science and Opto-Electronics Engineering,
Beijing Information Science and Technology University, Beijing 100192, China.
Yuchuan Wang
Tianjin Eye Hospital, Tianjin Key Lab of Ophthalmology and Visual Science, Nankai University Affiliated Eye Hospital, Nankai University Eye Institute, Nankai University, Clinical College of Ophthalmology Tianjin Medical University,
Tianjin Eye Institute, Tianjin 300020, China.
Yi Song
Tianjin Eye Hospital, Tianjin Key Lab of Ophthalmology and Visual Science, Nankai University Affiliated Eye Hospital, Nankai University Eye Institute, Nankai University, Clinical College of Ophthalmology Tianjin Medical University,
Tianjin Eye Institute, Tianjin 300020, China.
Xuexin Duan
State Key Laboratory of Precision Measuring Technology & Instruments,
Tianjin University, Tianjin 300072, China.
Rui You
School of Instrument Science and Opto-Electronics Engineering,
Beijing Information Science and Technology University, Beijing 100192, China.
Yan Wang
Tianjin Eye Hospital, Tianjin Key Lab of Ophthalmology and Visual Science, Nankai University Affiliated Eye Hospital, Nankai University Eye Institute, Nankai University, Clinical College of Ophthalmology Tianjin Medical University,
Tianjin Eye Institute, Tianjin 300020, China.
Miniaturization of health care, biomedical, and chemical systems is highly desirable for developing point-of-care testing (POCT) technologies. In system miniaturization, micropumps represent one of the major bottlenecks due to their undesirable pumping performance at such small sizes. Here, we developed a microelectromechanical system fabricated acoustic micropump based on an ultrahigh-frequency bulk acoustic wave resonator. The concept of an inner-boundary-confined acoustic jet was introduced to facilitate unidirectional flow. Benefitting from the high resonant frequency and confined acoustic streaming, the micropump reaches 32.620 kPa/cm3 (pressure/size) and 11.800 ml/min∙cm3 (flow rate/size), showing a 2-order-of-magnitude improvement in the energy transduction efficiency compared with the existing acoustic micropumps. As a proof of concept, the micropump was constructed as a wearable and wirelessly powered integrated drug delivery system with a size of only 9×9×9 mm3 and a weight of 1.16 g. It was demonstrated for ocular disease treatment through animal experimentation and a human pilot test. With superior pumping performance, miniaturized pump size, ultralow power consumption, and complementary metal–oxide–semiconductor compatibility, we expect it to be readily applied to various POCT applications including clinical diagnosis, prognosis, and drug delivery systems.
