Effect of Pt Nanoparticles on the Optical Gas Sensing Properties of WO3 Thin Films
Muhammad U. Qadri,
Alex Fabian Diaz Diaz,
Michaela Cittadini,
Alessandro Martucci,
Maria Cinta Pujol,
Josep Ferré-Borrull,
Eduard Llobet,
Magdalena Aguiló,
Francesc Díaz
Affiliations
Muhammad U. Qadri
Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Alex Fabian Diaz Diaz
Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy
Michaela Cittadini
Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy
Alessandro Martucci
Dipartimento di Ingegneria Industriale,Universita' di Padova,Via Marzolo 9, Padova 35131, Italy
Maria Cinta Pujol
Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Josep Ferré-Borrull
Dept. d'Enginyeria Electronica i Automatica-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Eduard Llobet
Microsystems and nanotechnologies for chemical analysis (MINOS-EMaS), Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Magdalena Aguiló
Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Francesc Díaz
Cristal·lografía de Materials i Nanomaterials (FiCMA-FiCNA)-EMaS, Universitat Rovira i Virgili, (URV), Campus Sescelades, c/Marcel·í Domingo s/n, Tarragona 43007, Spain
Thin films of tungsten trioxide were deposited on quartz substrates by RF magnetron sputtering. Different annealing temperatures in the range from 423 to 973 K were used under ambient atmosphere. The influence of the annealing temperature on the structure and optical properties of the resulting WO3 thin films were studied. The surface morphology of the films is composed of grains with an average size near 70 nm for the films annealed between 773 and 973 K. Some of the WO3 thin films were also coated with Pt nanoparticles of about 45 nm in size. Spectrometric measurements of transmittance were carried out for both types of WO3 samples in the wavelength range from 200–900 nm, to determine the effect of the exposure to two different gases namely H2 and CO. Films showed fast response and recovery times, in the range of few seconds. The addition of Pt nanoparticles enables reducing the operation temperature to room temperature.
