Reconfigurable MEMS Fano metasurfaces with multiple-input–output states for logic operations at terahertz frequencies

Abstract

Here, the authors demonstrate excitation and active tuning of sharp Fano resonances in a MEMS reconfigurable metasurface possessing multiple-input-output states. They realize XOR, XNOR, NOT and NAND logic gate operations by using two independently controllable electrical inputs and an optical readout using terahertz beam.