Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes

Abstract

This study investigates the nonlinear dynamic response behavior of a rotating ring that forms an essential element of MEMS (Micro Electro Mechanical Systems) ring-based vibratory gyroscopes that utilize oscillatory nonlinear electrostatic forces. For this purpose, the dynamic behavior due to nonlinear system characteristics and nonlinear external forces was studied in detail. The partial differential equations that represent the ring dynamics are reduced to coupled nonlinear ordinary differential equations by suitable addition of nonlinear mode functions and application of Galerkin’s procedure. Understanding the effects of nonlinear actuator dynamics is essential for characterizing the dynamic behavior of such devices. For this purpose, a suitable theoretical model to generate a nonlinear electrostatic force acting on the MEMS ring structure is formulated. Nonlinear dynamic responses in the driving and sensing directions are examined via time response, phase diagram, and Poincare’s map when the input angular motion and nonlinear electrostatic force are considered simultaneously. The analysis is envisaged to aid ongoing research associated with the fabrication of this type of device and provide design improvements in MEMS ring-based gyroscopes.

Keywords

• MEMS
• rotating ring
• coupled nonlinear system
• MEMS ring gyroscope
• bifurcation
• electrostatic force