Вестник Северо-Кавказского федерального университета (May 2022)

XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS

  • Roman V. Pigulev,
  • Konstantin I. Sidorov,
  • Vitaliy A. Tarala,
  • Sergey V. Lisitsyn,
  • Elena N. Belyaeva,
  • Maria V. Moskvicheva

Journal volume & issue
Vol. 0, no. 5
pp. 29 – 34

Abstract

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The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.

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