Micromachines (Jan 2022)
Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter
Abstract
Radio frequency (RF) filters with multiple passbands can meet the needs of miniaturization and integration for 5G communications. This paper reports a dual-mode Lamb wave resonator (DLWR) and a dual-passband filter based on DLWRs. The DLWR consists of a piezoelectric film and two interdigital electrode (IDT) arrays with different thicknesses, which leads to the coexistence of two main modes in the resonator. The resonance frequencies of the two modes can be adjusted separately by changing the thicknesses of the IDTs, which greatly satisfies the requirements of the dual-passband filter. Four DLWRs with different electrode configurations are designed, and the influences of the periodic length and thicknesses of the IDTs on the performance of the DLWR are studied. When the thickness of the piezoelectric layer is 0.75 μm and the two thicknesses of the IDTs are 0.1 μm and 0.3 μm, the resonance frequency of the second main mode is 1.27 GHz higher than the resonance frequency of the first main mode in the DLWR. Furthermore, a dual-passband filter based on the proposed DLWRs is demonstrated with an insertion loss less than 1 dB and a band rejection of about 15 dB. Moreover, two passbands at 2.45 GHz and 3.88 GHz with bandwidths of 66 MHz and 112 MHz, respectively, are achieved. The presented DLWR shows a potential application that can be used to obtain RF filters with adjustable dual passbands.
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