MEMS Fluxgate Sensor Based on Liquid Casting

Ying Yang; Wei Xu; Guangyuan Chen; Zhenhu Jin; Dandan Wang; Zhihong Mai; Guozhong Xing; Jiamin Chen

doi:10.3390/mi14122159

Micromachines (Nov 2023)

MEMS Fluxgate Sensor Based on Liquid Casting

Ying Yang,
Wei Xu,
Guangyuan Chen,
Zhenhu Jin,
Dandan Wang,
Zhihong Mai,
Guozhong Xing,
Jiamin Chen

Affiliations

Ying Yang: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Wei Xu: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Guangyuan Chen: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Zhenhu Jin: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
Dandan Wang: Jiufengshan Laboratory, Wuhan 430206, China
Zhihong Mai: Jiufengshan Laboratory, Wuhan 430206, China
Guozhong Xing: School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
Jiamin Chen: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

DOI: https://doi.org/10.3390/mi14122159
Journal volume & issue: Vol. 14, no. 12
p. 2159

Abstract

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Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this reason, a MEMS fluxgate sensor based on liquid casting with a closed-loop Fe-based amorphous alloy core is proposed. Based on the process parameters of liquid casting, the structure of the MEMS fluxgate sensor was designed. Utilizing MagNet to build the simulation model, the optimal excitation conditions and sensitivity were obtained. According to the simulation model, a highly sensitive MEMS fluxgate sensor based on liquid casting was fabricated. The resulting sensor exhibits a sensitivity of 2847 V/T, a noise of 306 pT/√Hz@1 Hz, a bandwidth of DC-10.5 kHz, and a power consumption of 43.9 mW, which shows high sensitivity and low power consumption compared with other MEMS fluxgates in similar size.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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