Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper

Abstract

Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons. In this paper, the thermal effect involved in the interaction of a capillary discharge 46.9 nm laser with copper was studied theoretically and experimentally. The temperature variation of the laser-irradiated region of copper was calculated. According to the results, the copper surface was ablated obviously and presented the trace of melting, evaporation, and resolidification, which suggested the thermal effect occurred on the surface during the laser irradiation.

Keywords

• 46.9 nm laser
• copper
• thermal effect
• laser-induced damage