Piezoelectric Analysis of Saw Sensor Using Finite Element Method

Abstract

In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The goal of modal analysis, is to determine the eigenfrequency of SAW, which is used in following transient analysis. In transient analysis, wave propagation in SAW sensor is investigated. Both analyses were performed using FEM code ANSYS.

Keywords

• SAW sensor
• MEMS
• piezoelectric material
• FEM analysis
• modal analysis
• transient analysis