Visualizing nanometric structures with sub-millimeter waves

Alonso Ingar Romero; Amlan kusum Mukherjee; Anuar Fernandez Olvera; Mario Méndez Aller; Sascha Preu

doi:10.1038/s41467-021-27264-x

Nature Communications (Dec 2021)

Visualizing nanometric structures with sub-millimeter waves

Alonso Ingar Romero,
Amlan kusum Mukherjee,
Anuar Fernandez Olvera,
Mario Méndez Aller,
Sascha Preu

Affiliations

Alonso Ingar Romero: Department of Electrical Engineering and Information Technology, Technical University of Darmstadt
Amlan kusum Mukherjee: Department of Electrical Engineering and Information Technology, Technical University of Darmstadt
Anuar Fernandez Olvera: Department of Electrical Engineering and Information Technology, Technical University of Darmstadt
Mario Méndez Aller: Department of Electrical Engineering and Information Technology, Technical University of Darmstadt
Sascha Preu: Department of Electrical Engineering and Information Technology, Technical University of Darmstadt

DOI: https://doi.org/10.1038/s41467-021-27264-x
Journal volume & issue: Vol. 12, no. 1
pp. 1 – 7

Abstract

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The authors demonstrate a far-field approach for height profile measurements with sub-millimetre waves. By evaluating Fabry-Pérot oscillations within surface-structured samples, combined with a Hilbert-transform approach, they visualize structures with a height of 49 nm, with 31 nm precision.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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