A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

Abstract

This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective coupling stiffness between the modes can be precisely controlled down to near-zero values. This allows the sensitivity of mode localization sensing to be tuned over a wide range. An order of magnitude enhancement in sensitivity is experimentally achieved by reducing the coupling stiffness towards zero. The resonator’s simple single-mass structure offers advantages over conventional coupled resonator designs for compact, tunable mode localization sensors. Both positive and negative values of coupling stiffness are demonstrated, enabling maximum sensitivity at the point where coupling crosses through zero. A method for decomposing overlapping resonance peaks is introduced to accurately measure the amplitude ratios of the localized modes even at high sensitivities. The electrostatic tuning approach provides a new option for realizing variable sensitivity mode localization devices using a simplified resonator geometry.

Keywords

• MEMS resonator
• mode localization
• sensitivity tuning