Analysis of Error Sources in the Lissajous Scanning Trajectory Based on Two-Dimensional MEMS Mirrors

Abstract

Deviations or distortions in the trajectoy of MEMS-based Lissajous scanning imaging platforms might be detrimental to imaging quality. These deviations often arise from differences in MEMS mirror frequency response characteristics and asymmetry in parameters within the measurement and control circuit. This study concentrated on the measurement and control circuit unit as it identified and analyzed four error sources: the MEMS mirror frequency response error, the AD acquisition synchronization error, the drive source error, and the cross-coupling error between the MEMS mirror axes. This study constructed a Lissajous trajectory test platform based on oscilloscopes and a position sensitive detector. Consequently, its experimental results guided the error processing methods to access the feasibility of the compensation methods by combining measured trajectories. Overall, regarding MEMS-based Lissajous scanning platforms for biomedical imaging, this study could provide quantitative numerical references for error analysis, image reconstruction, and aberration correction.

Keywords

• two-dimensional MEMS mirrors
• Lissajous scanning
• trajectory distortion
• error sources