Frontiers in Nanotechnology (Jul 2023)

Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

  • Malte J. M. J. Becher,
  • Julia Jagosz,
  • Claudia Bock,
  • Andreas Ostendorf,
  • Evgeny L. Gurevich,
  • Evgeny L. Gurevich

DOI
https://doi.org/10.3389/fnano.2023.1227025
Journal volume & issue
Vol. 5

Abstract

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The formation of laser-induced periodic surface structures (LIPSSs) on the atomic layer-deposited (ALD) molybdenum disulfide (MoS2) upon femtosecond laser processing is studied experimentally. Laser-processing parameters such as average laser power and the scan speed at which the formation of the periodic nanostructures takes place are identified. Optical and scanning electron microscopy are applied to identify the parameter regions for the different LIPSS formations and transitions between them. High- and low-spatial frequency LIPSS (HSFL and LSFL) with two distinct periods λLSFL ≈ 1.1 μm and λHSFL ≈ 83 nm can be observed. The HSFL are dominating at higher and the LSFL at lower laser average powers. Formation of LIPSS is found to inhibit laser ablation at lower scan speeds.

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