Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer

Abstract

Accurate and flexible form measurements for aspherical and freeform surfaces are in high demand, and non-null-test interferometric methods such as tilted-wave interferometry have gained attention as a promising response to this need. Interferometric methods, however, display ambiguities between the measurement of certain form errors and the misalignment of the measured specimen. Therefore, improved knowledge of the absolute measurement position of the specimen in relation to the interferometer setup may improve the form measurement result. In this work, we propose a concept that uses a white light interferometer to measure the absolute distance between a transparent specimen's surface and the interferometer's objective and present preparatory data to qualify the white light interferometer for the improvement of tilted-wave interferometer measurements.