Opto-Electronic Science (Jan 2023)

Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

  • Qilin Jiang,
  • Long Chen,
  • Jukun Liu,
  • Yuchan Zhang,
  • Shian Zhang,
  • Donghai Feng,
  • Tianqing Jia,
  • Peng Zhou,
  • Qian Wang,
  • Zhenrong Sun,
  • Hongxing Xu

DOI
https://doi.org/10.29026/oes.2023.220002
Journal volume & issue
Vol. 2, no. 1
pp. 1 – 12

Abstract

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This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.

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