Micromachines (Mar 2023)
Design, Fabrication and Analysis of a Hybrid-Order Monolithic Imaging Diffractive Lens on a Germanium Substrate
Abstract
Diffractive optical elements are gradually replacing some conventional optical elements and becoming a key component of optical systems due to their unique phase modulation function. However, the imaging performance will be reduced due to the fact that this single-sided microstructured lens still produces chromatic aberration. Therefore, the key issue for the application of diffractive optical elements in optical systems is the reduction of chromatic aberration, and diffractive lenses with double-sided microstructures are proposed as a solution. This research describes the design and analysis of a 70-mm-diameter, 296-mm-focal-length double-sided microstructured hybrid-order monolithic imaging diffractive lens operating in the mid-wave infrared region (3.7–4.7 μm). The design minimizes chromatic aberration by up to 30 times compared to a standard harmonic diffractive lens and improves the image performance of a single-lens optical system operating in the infrared range. Experiments indicate that this design is capable of achieving single-lens imaging with high sensitivity for optical systems with a measured NETD ≤ 50 mK. The analysis of the experiments yielded suggestions for future research.
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