Electron channeling pattern imaging – a novel approach for the determination of wafer offcut angles

• Han Han,
• Strakos Libor,
• Porret Clément,
• Depauw Valérie,
• Vystavel Tomas,
• Richard Olivier,
• Grieten Eva,
• Hantschel Thomas

Affiliations

Han Han

imec

Strakos Libor

Thermo Fischer Scientific

Porret Clément

imec

Depauw Valérie

imec

Vystavel Tomas

Thermo Fischer Scientific

Richard Olivier

imec

Grieten Eva

imec

Hantschel Thomas

imec