Influence of hydrogen absorption on stress changes in thin catalytic metal films dedicated for sensors application

• Prazmowska Joanna,
• Piasecki Tomasz,
• Szyszka Adam,
• Paszkiewicz Regina,
• Tłaczała Marek

Affiliations

Prazmowska Joanna

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland

Piasecki Tomasz

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland

Szyszka Adam

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland

Paszkiewicz Regina

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland

Tłaczała Marek

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland