Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency

Abstract

Objectives : Manufacturing－based production facilities are required to install dust collection devices for air pollution prevention facilities. In particular, manufacturing-based companies need low-power hazardous gas treatment devices. However, due to the slowing economic growth, the cost of replacing new hazardous gas treatment devices is increasing, and new products in the form of parts that can be attached to scrubbers that are already installed are urgently needed. Methods : To deal with residual gas from organic and inorganic compounds used in semiconductor manufacturing processes, the concentration of air pollutants emitted through the process of removing harmful substances from the primary scrubber and re-treatment of gases emitted from the secondary scrubber is further lowered. Results and Discussion : In this study, a cooling block device which is a hazardous gas treatment part is developed to solve the limitation of scrubber processing capacity from overcapacity harmful gases such as strong toxicity, corrosivity, combustion, and environmental pollution in semiconductor manufacturing process. Conclusions : In the design factors and performance survey of cooling module using thermoelectric element, it was calculated that the cooling capacity of the peltier thermoelectric element with a margin of 9,300 W was required. Based on these results, the absolute humidity decreased by 5.8 g/kg and the temperature decreased by 9.5 degrees, showing the possibility of solving the problem of the decrease in the effectiveness of hazardous gas treatment of secondary scrubber due to increased moisture.

Keywords

• semiconductor manufacturing process
• scrubber
• peltier thermoelectric element
• absolute humidity
• cooling capacity