Non-self-sustained discharge with hollow anode for plasma-based surface treatment

Abstract

The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by low voltage and high values of electron and ion currents. It can be easily excited in vacuum-arc installations that are widely used for coatings deposition. It is shown that such type of discharge may be effectively used for ion pumping, film deposition, ion etching, diffusion saturation of metallic materials, fusion and brazing of metals, and for combined application of above mentioned technologies in a single vacuum cycle.

Keywords

• diffusion saturation
• film deposition
• hollow anode
• ion etching
• ion pumping
• non-self-sustained glow discharge