Microstructure and Antimicrobial Properties of Zr-Cu-Ti Thin-Film Metallic Glass Deposited Using High-Power Impulse Magnetron Sputtering

Abstract

Zr-Cu based thin-film metallic glass (TFMG) has good glass-forming ability and the addition of a third element can create a chaotic system capable of inhibiting the nucleation and growth of crystals. This study focused on TFMGs made with Zr, Cu, and Ti in various compositions deposited via high-impulse magnetron sputtering on silicon and 304 stainless-steel substrates. Detailed analysis was performed on the microstructure and surface characteristics of the resulting coatings. Transmission electron microscopy revealed that the multilayer structure changed to a nanocrystalline structure similar to an amorphous coating. The excellent hydrophobicity of Zr-Cu-Ti TFMGs can be attributed to their ultra-smooth surface without any grain boundaries. The excellent antimicrobial effects can be attributed to a hydrophobic surface resisting cell adhesion and the presence of copper ions, which are lethal to microbes.

Keywords

• ZrCuTi
• nanocrystalline
• antimicrobial effect
• TFMGs
• multilayer