ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection

Abstract

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure. Experimental results demonstrate that at a resonant frequency of 78 kHz, a single PMUT generates a sound pressure level (SPL) of 112.2 dB at a distance of 10 mm and achieves a high receiving sensitivity of 12.3 mV/Pa. Distance testing reveals that a single PMUT equipped with a horn can achieve a record-breaking distance sensing range of 11.2 m when used alongside a device capable of simultaneously transmitting and receiving ultrasound signals. This achievement is significant for miniaturized and integrated applications that utilize ultrasound for long-range target detection.

Keywords

• piezoelectric micromachined ultrasonic transducer (PMUT)
• scandium-doped aluminum nitride (ScAlN)
• flexurally suspended membrane
• long-range target detection