Micromachines (Oct 2019)

Design and Optimization of Germanium-Based Gate-Metal-Core Vertical Nanowire Tunnel FET

  • Won Douk Jang,
  • Young Jun Yoon,
  • Min Su Cho,
  • Jun Hyeok Jung,
  • Sang Ho Lee,
  • Jaewon Jang,
  • Jin-Hyuk Bae,
  • In Man Kang

DOI
https://doi.org/10.3390/mi10110749
Journal volume & issue
Vol. 10, no. 11
p. 749

Abstract

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In this paper, a germanium-based gate-metal-core vertical nanowire tunnel field effect transistor (VNWTFET) has been designed and optimized using the technology computer-aided design (TCAD) simulation. In the proposed structure, by locating the gate-metal as a core of the nanowire, a more extensive band-to-band tunneling (BTBT) area can be achieved compared with the conventional core−shell VNWTFETs. The channel thickness (Tch), the gate-metal height (Hg), and the channel height (Hch) were considered as the design parameters for the optimization of device performances. The designed gate-metal-core VNWTFET exhibits outstanding performance, with an on-state current (Ion) of 80.9 μA/μm, off-state current (Ioff) of 1.09 × 10−12 A/μm, threshold voltage (Vt) of 0.21 V, and subthreshold swing (SS) of 42.8 mV/dec. Therefore, the proposed device was demonstrated to be a promising logic device for low-power applications.

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