Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor

Abstract

An efficient and inexpensive post-process method to waterproof an electrically actuated microtransducer has been studied. The electrical signals of microtransducers operating in electrically conductive fluids must be effectively isolated from the surrounding environment while remaining in contact for sensing purposes. A thermally actuated MEMS viscosity sensor uses electrical signals for both actuation and sensing. Three post-processing materials, (1) Parylene-C, (2) flouroacrylate-based polymer, and (3) nitrocellulose-based polymer, were coated as thin layers of waterproofing materials on different sensors. All three coating materials provided adequate protection when tested under normal operating conditions. Although the vibration response of the sensors was slightly modified, it did not affect their functionality in a significant way when measuring conductive fluids based on glycerol–water mixtures. All the treated sensors lasted over 1.2 million actuations without any decay in performance or failures. When the test bias conditions were increased by 5x to accelerate failures, the flouroacrylate-based polymer samples lasted 2x longer than the others. Visual analysis of the failures indicates that the edge of the diaphragm, which undergoes the most significant stress and strain values during actuation, was the location of the mechanical failure. This work guides post-processed waterproofing coatings for microscale actuators operating in harsh and damaging environments.

Keywords

• MEMS
• viscosity sensors
• microelectronics
• waterproofing