Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge

Abstract

The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a novel microparticle vacuum chamber based on the micro-electro-mechanical system (MEMS) process. This MEMS microparticle vacuum chamber adopts a “glass-silicon-glass” three-layer vacuum bonding process, with a volume of only 15 mm × 12 mm × 1.2 mm, including particle chamber, cantilever resonator chamber, and getter chamber, which can encapsulate microparticles in a tiny vacuum environment and realize optical levitation of microparticles. At the same time, the air pressure in the micro vacuum chamber is monitored by the cantilever resonator, which can provide a miniaturized microparticle chamber with a more accurate vacuum environment for microparticle optical levitation. The research of this paper has significance for promoting the development of miniaturized optical levitation technology.

Keywords

• optical levitation
• MEMS microparticle chamber
• vacuum measurement
• wafer-level vacuum packaging