Post-Processing Method for Image Reconstruction Enhancement in Integrating-Bucket-Based Full-Field Optical Coherence Tomography

Abstract

An integrating-bucket method is widely used as a reconstruction tool for full-field optical coherence tomography (FF-OCT). However, it requires high-precision adjustments of the phase modulation parameters. If the parameters are not optimal, the reconstructed tomogram will incur severe artifacts. We propose a post-processing method for removing or reducing such artifacts by utilizing a correction factor extracted from a pre-reconstructed tomogram. FF-OCT imaging created using a coin verifies the effectiveness of the method not only for a single en face image but also for an entire 3-D image. It is expected that the proposed method will expand the application of FF-OCT from biomedical imaging to semiconductor wafers or display panel inspections.

Keywords

• full-field optical coherence tomography
• phase-shifting interferometry
• artifact removal
• integrating-bucket method
• post-processing