Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength

Abstract

We report on a new optical sensing principle for measuring the electric field strength based on MEMS technology. This method allows for distortion-free and point-like measurements with high stability regarding temperature. The main focus of this paper rests on an enhanced measurement set-up and the thereby obtained measurement results. These results reveal an improved resolution limit and point to the limitations of the current characterization approach. A resolution limit of 222 V/m was achieved while a further improvement of roughly one order of magnitude is feasible.

Keywords

• electric field
• electric field sensor
• sensor
• distortion-free
• point-like
• MEMS
• MOEMS