Frontiers in Materials (Oct 2022)

MBE growth and optimization of the InGaAs/InAlAs materials system for quantum cascade laser

  • Wang Tian,
  • Dong-liang Zhang,
  • Xian-tong Zheng,
  • Ruo-ke Yang,
  • Yuan Liu,
  • Li-dan Lu,
  • Lian-qing Zhu

DOI
https://doi.org/10.3389/fmats.2022.1050205
Journal volume & issue
Vol. 9

Abstract

Read online

High material quality is the foundation for the excellent performance of quantum cascade lasers. This paper investigates the growth conditions for InGaAs/InAlAs/InP superlattices combined solid-source molecular beam epitaxy with metal-organic chemical vapor deposition. Based on the optimization of growth conditions of InGaAs buffer epilayers, the effects of the growth temperature, interruption time, and V/III flux ratio on the quality of InGaAs/InAlAs/InP superlattices were systematically investigated. High-resolution x-ray diffraction and atomic force microscopy prove that this optimized InP-based superlattice has excellent periodicity and sharp interfaces.

Keywords