Development of MEMS-based micro-force measurement system with zero-compliance mechanism

Abstract

A miniaturized force measurement device with zero-compliance mechanism is designed and fabricated using MEMS technology. Zero-compliance mechanism consists of two suspensions connected in series through a detection point. When a force is applied to an object suspended by this mechanism, the position of the object can be kept constant by controlling the detection point. Furthermore, the force can be estimated from the displacement of the detection point because the displacement of the detection point is proportional to the force. The measurement method using zero-compliance mechanism is effective for measuring interatomic force, which is usually a function of the gap between objects. This work focuses on the miniaturization of this mechanism by MEMS technology. An experimental device is designed and fabricated. This device consists of comb-drive actuators, capacitance sensors using comb electrodes and leaf springs. It is experimentally confirmed that zero-compliance can be realized in such a miniature device fabricated using MEMS technology. In addition, measurement performances are improved in the device.

Keywords

• force measurement
• micro force
• mems
• zero-compliance mechanism
• feedback control