A Catalytic Sensor for Measurement of Radical Density in CO2 Plasmas

Abstract

A catalytic sensor for the measurement of radical density in weakly ionized CO2 plasmas, created in a low-pressure electrodeless discharge, is presented. The CO2 plasma was created in a 4 cm wide borosilicate glass tube inside a copper coil connected to a radio frequency generator operating at 27.12 MHz with a nominal power of 250 W. The dissociation fraction of the CO2 molecules was measured in the early afterglow at pressures ranging from 10 Pa to 100 Pa, and at distances of up to 35 cm along the gas stream from the glowing plasma. The radical density peaked (2 × 1020 m–3) at 80 Pa. The density quickly decreased with increasing distance from the glowing plasma despite a rather large drift velocity. The dissociation fraction showed similar behavior, except that the maximum was obtained at somewhat lower pressure. The results were explained by rather intense surface recombination of radicals.

Keywords

• catalytic probe
• plasma probes
• atom measurement
• dissociation fraction measurement
• carbon dioxide plasma