Recent Progress in Flexible Surface Acoustic Wave Sensing Technologies

Abstract

In this work, the major methods for implementing flexible sensing technology—flexible surface acoustic wave (SAW) sensors—are summarized; the working principles and device characteristics of the flexible SAW sensors are introduced; and the latest achievements of the flexible SAW sensors in the selection of the substrate materials, the development of the piezoelectric thin films, and the structural design of the interdigital transducers are discussed. This paper focuses on analyzing the research status of physical flexible SAW sensors such as temperature, humidity, and ultraviolet radiation, including the sensing mechanism, bending strain performance, device performance parameters, advantages and disadvantages, etc. It also looks forward to the development of future chemical flexible SAW sensors for gases, the optimization of the direction of the overall device design, and systematic research on acoustic sensing theory under strain. This will enable the manufacturing of multifunctional and diverse sensors that better meet human needs.

Keywords

• flexible sensing technology
• substrate material
• piezoelectric thin films
• physical flexible SAW sensors
• structural design of interdigital transducers